File:DRAM self-aligned storage node locations.png

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DRAM_self-aligned_storage_node_locations.png(706 × 550 pixels, file size: 52 KB, MIME type: image/png)

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Summary

Description
English: For a given set of bit lines and word lines, the storage node locations (purple circles) can be self-aligned to the bit line contact locations (green).[1][2]
Date
Source Own work
Author Guiding light

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Reference

  1. J. Park et al., "20nm DRAM: A new beginning of another revolution," IEDM 2015.
  2. Y-S. Kang et al., J. Micro/Nanolith. MEMS MOEMS 15, 021403 (2016).

Captions

For a given set of bit lines and word lines, the storage node locations can be self-aligned to the bit line contact locations

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20 February 2021

image/png

fcef630078167b3bd1befcb14835d2df7ea66f07

53,248 byte

550 pixel

706 pixel

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Date/TimeThumbnailDimensionsUserComment
current16:01, 26 February 2021Thumbnail for version as of 16:01, 26 February 2021706 × 550 (52 KB)commons>Guiding lightBLC shape changes

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